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MEMS Mass Flow Sensor
D6F-03A3-000
Compact, sensors featuring MEMS
technology for precision mass airflow
measurement.
? Precision unidirectional mass airflow up to 3 LPM
? Fast Response (< 5 msec, typical)
? Ultra-compact size 36.6 (L) x 8 (W) x 16.8 (H) mm
? Low power consumption
? RoHS Compliant
Ordering Information
Description
Mass Flow Sensor
Cable Connector Assembly
Case
Thermoplastic resin / Aluminum Alloy
---
Applicable gas
Air*
---
Flow range**
0-3L/min
---
Model
D6F-03A3-000
D6F-CABLE2
Note: Cable Assembly is sold separately.
* Contact Omron for other gases.
**Mass flow converted to volumetric flow (standard liters per minute) at 0 ° C and 1 atm.
■ Application examples
?
?
?
?
Pick and place systems
Industrial processes
Leak detection
Spectroscopy
?
?
?
?
Mass flow controllers
Scientific / test equipment
Environmental comfort controls
Fuel cell controls
Ratings
■ Absolute Maximum Rating
Item
Power supply
Output voltage
Symbol
V CC
V OUT
Rating
26.4
6
Unit
VDC
VDC
■ Electrical Performance
Item
Power supply
Operating temperature
Output voltage (max.)
Output voltage (min.)
Symbol
V CC
T OPR
V OH
V OL
Condition
—
No condensation or icing
Load resistance: 10k Ω
Load resistance: 10k Ω
Min.
10.8
0
5
0
Max.
26.4
50
5.7
1
Unit
VDC
° C
VDC
VDC
MEMS Mass Flow Sensor
D6F-03A3-000
19
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